Semiconductor devices and methods for forming patterned radiation blocking on a semiconductor device

ABSTRACT

Several embodiments for semiconductor devices and methods for forming semiconductor devices are disclosed herein. One embodiment is directed to a method for manufacturing a microelectronic imager having a die including an image sensor, an integrated circuit electrically coupled to the image sensor, and electrical connectors electrically coupled to the integrated circuit. The method can comprise covering the electrical connectors with a radiation blocking layer and forming apertures aligned with the electrical connectors through a layer of photo-resist on the radiation blocking layer. The radiation blocking layer is not photoreactive such that it cannot be patterned using radiation. The method further includes etching openings in the radiation blocking layer through the apertures of the photo-resist layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No. 14/716,628filed May 19, 2015, which is a divisional of U.S. application Ser. No.13/924,098 filed Jun. 21, 2013, now U.S. Pat. No. 9,064,984, which is adivisional of U.S. application Ser. No. 13/113,638 filed May 23, 2011,now U.S. Pat. No. 8,497,186, which is a divisional of U.S. applicationSer. No. 12/410,343 filed Mar. 24, 2009, now U.S. Pat. No. 7,947,601,each of which is incorporated herein by reference in its entirety.

TECHNICAL FIELD

The present disclosure is related to semiconductor devices and methodsfor forming patterned radiation blocking on a semiconductor device.

BACKGROUND

Microelectronic imaging devices include semiconductor dies having imagesensors located on a front surface of the die to receive incomingradiation. The dies also include external contacts or terminals forelectrically coupling the sensors to other circuit elements. To preventthe external contacts from interfering with the operation of the sensorsor limiting the size and/or location of the sensors, the externalcontacts at the front surface can be electrically coupled tocorresponding external contacts on the back surface of the die byinternal interconnects. The internal interconnects can bethrough-substrate vias (TSVs). The TSVs are formed by (a) making throughholes or blind holes in the die that are aligned with the correspondingexternal contacts, (b) lining the sidewalls of the openings with adielectric material, and (c) at least partially filling the openingswith a conductive material. External interconnect elements such assolder balls or wirebonds can then be attached to the external contactson the backside to couple the die to external devices.

FIGS. 1A-1D illustrate a process for forming an infrared radiation (IR)blocking layer on a backside of an imager 10 using two separatephoto-lithography processes. FIG. 1A illustrates the imager 10 beingformed on a microfeature workpiece 100 having a substrate 101 with afront side 103 and a backside 105, a dielectric layer 102 with a firstsurface 104 and a second surface 106, and a plurality of holes 108 withdielectric liners 109. The imager 10 also has an image sensor 107 a atthe front side 103 of the substrate 101, integrated circuitry 107 b onand/or in the substrate 101, and bond pads 110 at the front side 103.The workpiece 100 also has a conductive redistribution structure 111having traces 112 on the first surface 104 of the dielectric layer 102,interconnects 114 in the holes 108, and ball-pads 116 at or near the endof respective traces 112.

To form an IR blocking layer over the backside 105 of the substrate 101and the conductive redistribution structure 111, two separatephoto-lithography processes are performed. FIG. 1B illustrates a firstphoto-lithography process in which a photo-definable IR blocking layer118 is applied the workpiece 100 to cover the conductive redistributionstructure 111 and the exposed portions of the dielectric layer 102. TheIR blocking layer 118 is typically applied using a conventional spin-onprocess in which a liquid IR blocking material is deposited onto theworkpiece and the workpiece is rotated to spread the liquid IR blockingmaterial. A first photo-lithography process is performed to patternopenings 119 through the IR blocking layer 118. At the same time thematerial inside the via may or may not be removed. The openings 119 arepatterned such that they expose the ball-pads 116 as shown in FIG. 1C.The IR blocking material is then cured or hardened. FIG. 1C shows the IRblocking material inside the via.

After the ball-pads 116 are exposed, a photoreactive passivation layer120 is applied to the IR blocking layer 118 as shown in FIG. 1D. Thepassivation layer 120 is typically a preformed dry resist filmpositioned on the workpiece in a vacuum environment. The vacuum is thenreleased to pull the passivation layer 120 into the holes 108. Thepassivation layer may line the hole as shown in FIG. 1D, or it cancompletely fill the hole. After depositing the passivation layer 120, asecond photo-lithography process is performed to form openings 121 inthe passivation layer 120 aligned with the ball-pads 116. After theopenings 121 are formed, a solder ball or other external connector maybe attached to the ball-pads 116.

One drawback of the method shown in FIGS. 1A-1D is that two separatephoto-lithography processes are required. Photo-lithography equipment isexpensive, and the process of applying, exposing, and developing thelayers of IR blocking material and passivation material to form theopenings 119 and 120 can be time consuming. As such, the methoddescribed with respect to FIGS. 1A-1D is capital intensive and expensiveto perform.

Another drawback of the method shown in FIGS. 1A-1D is thatphoto-patterned IR blocking layers may not adequately block infraredradiation. This problem occurs because spin-on processes may notuniformly coat topographic structures, such as deep holes forthrough-substrate interconnects, with the liquid IR blocking material.As a result, it is generally desirable to deposit a thick layer of IRblocking material using conventional spin-on processes to adequatelycover the surface of the wafer with the IR blocking material. However,because IR blocking material blocks radiation, the IR blocking layercannot be too thick or else the radiation of the photo-patterningprocess will not penetrate through the full thickness of the IR blockinglayer. Conventional IR blocking layers in microelectronic imagers areaccordingly susceptible to allowing infrared radiation to pass throughthe blocking layer to the imager.

A further drawback of the method described in FIGS. 1A-1D is thatphoto-definable materials are relatively more expensive than equivalentmaterials that are not photo-definable. As a result, in addition to thecost of the photo-patterning tool, photo-definable IR blocking layersare relatively expensive.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A-1D are schematic cross-sectional views of various stages in amethod for forming a patterned IR blocking layer according to the priorart.

FIGS. 2A-2D are schematic cross-sectional views of various stages in amethod for forming patterned IR blocking layers in accordance withseveral embodiments of the disclosure.

FIGS. 3A and 3B are schematic cross-sectional views of various stages ina method for forming patterned IR blocking layers in accordance withseveral embodiments of the disclosure.

FIGS. 4A-4C are schematic cross-sectional views of various stages in amethod for forming patterned IR blocking layers in accordance withadditional embodiments of the disclosure.

FIG. 5 is a flowchart of a method for forming a patterned IR blockinglayer using a preformed IR blocking film in accordance with anembodiment of the disclosure.

FIG. 6 is a flowchart of another method for forming a patterned IRblocking layer without photo-patterning the IR blocking material inaccordance with additional embodiments of the disclosure.

FIG. 7 is a schematic cross-sectional view of a microelectronic imagerincluding a patterned IR blocking layer in accordance with an embodimentof the disclosure.

FIG. 8 is a schematic view of a system including microelectronic deviceshaving patterned IR blocking layers in accordance with embodiments ofthe disclosure.

DETAILED DESCRIPTION

Various embodiments of semiconductor devices and methods for formingpatterned IR blocking layers in semiconductor devices are describedbelow. The term “microfeature substrate” is used throughout to includesemiconductor substrates and other types of substrates upon which and/orin which semiconductor devices, other types of microelectronic devices,micromechanical devices, data storage elements, read/write components,and other features are fabricated. Microfeature substrates can includeone or more layers (e.g., conductive, semiconductive, and/or dielectric)that are situated upon and/or within one another. These layers caninclude or form a wide variety of electrical components, mechanicalcomponents, and/or systems of such components (e.g., integratedcircuits, memory devices, processors, imagers, micromechanical systems,etc.). The term “surface” can encompass planar and nonplanar surfaces ofa semiconductor substrate with or without patterned and non-patternedfeatures. A person skilled in the relevant art will also understand thatthe disclosure may have additional embodiments, and that the disclosuremay be practiced without several of the details of the embodiments shownand described below with reference to FIGS. 2A-8.

FIGS. 2A-2D illustrate several stages of a process for forming apatterned IR blocking layer on a semiconductor device in accordance withseveral embodiments of the disclosure. FIG. 2A illustrates amicroelectronic device 200, such as a microelectronic imager, and amicrofeature workpiece 210 having a semiconductor substrate 211 with afront side 212 and a backside 213. In a typical application, a pluralityof individual microelectronic devices 200 are formed on and/or in themicrofeature workpiece 210, but for the purposes of clarity only asingle microelectronic device 200 is described herein with theunderstanding that each device on the microfeature workpiece 210 can bethe same. The embodiment of the microelectronic device 200 illustratedin FIG. 2A is a microelectronic imager having integrated circuitry 214,an image sensor array 216 electrically coupled to the integratedcircuitry 214, and a plurality of holes 217 extending from the frontside 212 to the backside 213 of the substrate 211. The side walls of theholes 217 are coated with a dielectric liner 218, and bond pads 219located at the front side 212 of the substrate 211 cover or otherwiseclose-off one end of the holes 217. The holes 217 can be formed withknown methods such as etching or laser drilling, and the dielectricliners 218 can be formed using known deposition and etching techniques.

At this stage of the process, a redistribution structure 220 has beenformed at the backside 213 of the substrate 211. The redistributionstructure 220 includes a dielectric layer 222 on the backside 213 of thesubstrate 211, a plurality of interconnects 224 in the holes 217, aplurality of traces 226 on the dielectric layer 222, and a plurality ofpads 228. The interconnects 224 illustrated in FIG. 2A arethrough-substrate interconnects that extend from the backside of thebond pads 219 to the traces 226. The traces 226 extend laterally fromthe holes 217 to space the pads 228 apart from one another so thatsolder balls or other electrical connectors can be formed on the pads228. The interconnects 224, traces 226, and pads 228 can be formedintegrally from a single layer of conductive material, or one or more ofthese components can be formed separately from the same or differentmaterial. For example, the interconnects 224 can be formed from amaterial that completely fills the holes 217, and the traces 226 andpads 228 can be formed from a different material that is deposited ontothe dielectric layer 222 and subsequently etched through a photo-mask.Alternatively, as shown in FIG. 2A, the interconnects 224, traces 226,and pads 228 are formed from a conformal layer of copper or anothersuitably conductive material by depositing the conformal layer acrossthe dielectric layer 222 and into the holes 217. The conformal layer isthen covered with a photo-mask and etched to form the individualinterconnects 224, traces 226, and pads 228.

As shown in FIG. 2A, a preformed IR blocking layer 230 is placed on theredistribution structure 220. The IR blocking layer 230 is made from amaterial that absorbs or otherwise blocks a sufficient amount ofinfrared radiation. The IR blocking layer 230, for example, hassufficient non-photoreactive properties so that it at leastsubstantially prevents or otherwise inhibits the formation ofmicrofeatures using photolithography or other processes that formedpatterns in other layers or the like on the wafer. The IR blocking layeris accordingly at least substantially non-photoreactive (i.e., it is atleast substantially not “photo-definable”). As a result, the IR blockinglayer 230 is not suitable for being patterned and developed in aphoto-lithography process. The materials of the IR blocking layer 230are accordingly not limited to photo-lithographic materials, but ratherthe materials of the IR blocking layer 230 can have high IR blockingproperties. In some embodiments, for example, the IR blocking layer 230can be a black polymeric sheet that absorbs all or nearly all of theinfrared radiation and/or other selected radiation to which it isexposed. The IR blocking layer 230 is generally a preformed film orlaminated structure having a predetermined thickness before it is placedon the microfeature workpiece 210.

FIG. 2B illustrates a subsequent stage in which the IR blocking layer230 has been shaped to conform to the topography of the holes 217,traces 226, and pads 228. In one embodiment, the IR blocking layer 230is placed on the redistribution structure 220 as shown in FIG. 2A in alow-pressure environment (e.g., a vacuum chamber). As the vacuum isreleased, low-pressure regions remain in the open spaces of the holes217 and other open spaces between the IR blocking layer 230 and theredistribution structure 220. The IR blocking layer 230 is accordinglydrawn into the low-pressure regions until it conforms to the topographyof the holes 217 and the redistribution structure 220 as shown in FIG.2B.

FIG. 2C illustrates a subsequent stage in which a passivation layer 240is disposed on the IR blocking layer 230. In the embodiment shown inFIG. 2C, the passivation layer 240 is a photo-resist material that issubsequently photo-patterned to form a plurality of apertures 242aligned with corresponding pads 228. The passivation layer 240illustrated in FIG. 2C can be a liquid photo-resist disposed onto the IRblocking layer 230 using conventional spin-on processes, or thepassivation layer 240 can be a dry resist deposited onto the IR blockinglayer 230 after it has been shaped to conform to the topography of theholes 217 and the redistribution structure 220. The dry resist may alsocompletely fill the holes in other embodiments. The IR blocking layerand photo-resist film layer may be made from different materials knownin the art in other embodiments.

FIG. 2D illustrates a subsequent stage in which openings 232 are formedin the IR blocking layer 230 such that the pads 228 are exposed throughthe openings 232 and the apertures 242. The openings 230 can be formedby disposing a wet or dry etchant in the apertures 242 to etch thepattern of openings 232 in the IR blocking layer 230. A dry etch processmay reduce the thickness of the passivation layer 240 and the IRblocking layer 230 by the same amount. The thickness of passivation andIR blocking layers 240 and 230 are selected to allow the desiredthickness to remain on the surface. Solder balls or other electricalconnectors can then be connected to the pads 228 to provide backsideelectrical connections for the individual microelectronic devices 200.

FIGS. 3A and 3B are cross-sectional views illustrating stages of amethod in accordance with another embodiment for forming a patterned IRblocking layer on a semiconductor device or other microelectronicdevice. Like reference numbers refer to like components in FIGS. 2A-3B.Referring to FIG. 3A, this embodiment includes applying the preformed IRblocking layer 230 to the microfeature workpiece 210 and then disposingthe passivation layer 240 on the IR blocking layer 230. The embodimentillustrated in FIG. 3A differs from the embodiment illustrated in FIGS.2B and 2C in that the passivation layer 240 is disposed on the preformedIR blocking layer 230 before the preformed IR blocking layer 230 isshaped to conform to the topography of the redistribution structure 220.The passivation layer 240 can be a dry resist or other suitable resistthat can be applied in a low-pressure environment. The embodimentillustrated in FIG. 3A accordingly provides a laminated bi-layer IRblocking structure in which the passivation layer 240 is formed in situwhile the IR blocking layer 230 is on the microfeature workpiece 210.

FIG. 3B illustrates a subsequent stage in which the vacuum has beenreleased such that the laminated bi-layer IR blocking structure is drawninto the holes 217 and the other regions between the preformed IRblocking layer 230 and the microfeature workpiece 210. After this stage,apertures can be formed in the passivation layer 240 and then openingscan be etched through the IR blocking layer 230 as shown above withrespect to FIGS. 2C and 2D.

FIGS. 4A-4C illustrate stages of a method for forming patterned IRblocking layers in semiconductor devices or other microelectronicdevices in accordance with another embodiment. Like reference numbersrefer to like components in FIGS. 2A-4B. Referring to FIG. 4A, apreformed bi-layer IR blocking structure 250 is formed apart from themicrofeature workpiece 210. The IR blocking structure 250 is accordinglyformed before disposing the IR blocking layer 230 over theredistribution structure 220. The IR blocking structure 250 can includea first preformed sheet having a first thickness and a second preformedsheet laminated to the first preformed sheet. In one embodiment, forexample, the IR blocking layer 230 is a first preformed sheet and thepassivation layer 240 is a second preformed sheet that is bonded orotherwise laminated to the IR blocking layer 230. In an alternativeembodiment, the IR blocking layer 230 is a preformed sheet and thepassivation layer 240 is then formed on the preformed sheet of the IRblocking layer 230. The passivation layer 240, for example, can be aresist that is deposited onto the performed IR blocking layer 230 apartfrom the microfeature workpiece 210. The IR blocking structure 250 canbe cut or otherwise shaped to at least approximately correspond to thesize and shape of the microfeature workpiece 210 before the IR blockingstructure 250 is placed or otherwise applied to the microfeatureworkpiece 210.

FIG. 4B illustrates a subsequent stage in which the IR blockingstructure 250 is applied to the microfeature workpiece 210 such that theIR blocking layer 230 is disposed on the redistribution structure 220.This process can be performed in a low-pressure environment such thatlow-pressure regions exist in the holes 217 and other vacant regionsbetween the microfeature workpiece 210 and the IR blocking layer 230.Referring to FIG. 4C, the vacuum can then be released to draw the IRblocking structure 250 into the holes 217 and other low-pressure regionssuch that the IR blocking structure 250 conforms to the topography ofthe holes 217 and the redistribution structure 220. As with the otherembodiments described above, a plurality of apertures can be formed inthe passivation layer 240 and then openings can be etched in the IRblocking layer 230 to expose the pads 228 of the redistributionstructure 220.

One feature of embodiments of the systems and methods described abovewith reference to FIGS. 2A-4B is that only a single photo-lithographyprocess is used to form both the apertures in the passivation layer andthe openings in the IR blocking layer. By providing a preformed IRblocking layer and then shaping the preformed IR blocking layer toconform to the redistribution structure, the pads of the redistributionstructure can be exposed with only one photo-lithography process. Thisenables photo-lithography tools to be used for other processes.

Another feature of embodiments of the systems described above withreference to FIGS. 2A-4B is that the IR blocking layer is notphotoreactive. As explained above, photo-definable IR blocking layersneed to be thin so that the exposure radiation can penetrate the fullthickness of the film. If the film is too thick, a pattern of holes willnot be formed through the film. At the same time, if the film is toothin, it will not effectively absorb enough IR or other selectedradiation. Thus, photo-definable IR blocking layers of the prior artrequire a balance between being thin enough to work in photo-lithographyprocesses and thick enough to block sufficient radiation. However, theIR blocking layer 230 is not limited to being thin because it is notpatterned by a photo-lithography process to form the openings 232 (FIG.2D). The IR blocking layer 230 can also be made from materials thatblock all or nearly all of the IR or other selected radiation (e.g., canblock potentially at least 90% and more specifically block potentially95%-99% of the IR or other radiation). Thus, the IR blocking layer 230can block IR or other selected radiation.

FIG. 5 illustrates a flowchart of a method 500 for manufacturing amicroelectronic imager having a substrate, an image sensor at a firstside of the substrate, integrated circuitry coupled to the image sensor,and a plurality of bond-pads at the first side of the substrate that areelectrically coupled to the integrated circuitry. The method 500comprises forming a redistribution structure having through-substrateinterconnects and traces electrically coupled to the through-substrateinterconnects (block 510). The through-substrate interconnects extendfrom corresponding bond-pads to a second side of the substrate, and thetraces extend over the second side of the substrate. The method 500continues by disposing a first film comprising infrared blockingmaterial that is at least substantially non-photoreactive over thetraces (block 520). The first film, for example, can be the IR blockinglayer 230 described above. The method 500 continues by photo-patterninga second film of a photo-definable material on the first film andthereby exposing portions of the first film aligned with correspondingtraces (block 530). The method 500 further includes etching openings atthe exposed portions of the first film to expose ball-pads on the traces(block 540).

Another method of manufacturing a microelectronic imager comprisescovering the electrical connectors of a redistribution structure with anIR blocking layer that is at least substantially non-photoreactive. Thisembodiment further comprises forming apertures through a layer ofphoto-resist on the IR blocking layer. The apertures are aligned withthe electrical connectors of the redistribution structure. The methodcontinues by etching openings in the infrared blocking layer through theapertures of the photo-resist layer.

FIG. 6 illustrates an embodiment of a method 600 for fabricating asemiconductor device having a die including a substrate with a firstside and a second side, integrated circuitry, and bond-pads located atthe first side that are electrically coupled to the integratedcircuitry. The method 600 includes forming a conductive structure havinginterconnects and traces such that the interconnects are electricallycoupled to the bond-pads and extend to the second side of the substrateand the traces extend from the interconnects over the second side of thesubstrate (block 610). The method continues by providing a preformedlaminated bi-layer structure that is formed apart from the substrate(block 620). The preformed laminated bi-layer structure can have a firstlayer of material that is at least substantially non-photoreactive and asecond layer of a photoreactive material. The method 600 furtherincludes applying the preformed laminated bi-layer structure to thesecond side of the substrate such that the preformed laminated bi-layerstructure conforms to the topography of the traces and the interconnects(block 630). The method 600 further includes photo-patterning aperturesin the second layer of the preformed laminated bi-layer structure thatare aligned with ball-pad portions of the traces (block 640), andforming openings in the first layer of the laminated bi-layer structurewithout photo-patterning the first layer (block 650).

FIG. 7 is a schematic cross-sectional illustration of a packagedmicroelectronic imager 700 that includes a backside IR blocking layercomposed of a material that is at least substantially non-photoreactive.Like reference numbers refer to like components in FIGS. 2A-4B and FIG.7. In addition to the components described above, the packaged imager700 further includes a first standoff 710 attached to the front side ofthe substrate 211, a cover 720 attached to the first standoff 710, and asecond standoff 730 attached to the cover 720. The packaged imager 700can further include a lens assembly 740 attached to the second standoff730. The first and second standoffs 710 and 730, the cover 720, and thelens assembly 740 are merely shown for illustrative purposes and are notlimited to either their individual configurations or the order in whichthey are stacked in FIG. 7. In several embodiments, for example, thepackaged imager 700 may not include the cover 720 or the lens assembly740. The packaged imager 700 further includes a plurality of externalelectrical connectors 750, such as solder balls, attached to the pads228. As shown in FIG. 7, the two external electrical connectors 750located toward the center of the packaged imager 700 are positionedthrough the apertures 242 and openings 232 of corresponding pads 228.The external connectors 750 illustrated in FIG. 7 are similarlyconnected to pads of the redistribution structure, but the pads at theexternal connectors 750 are not shown in FIG. 7 because the externalconnectors are at a different cross-sectional plane through the packagedimager 700.

Other types of semiconductor or other microelectronic devices caninclude a patterned backside IR blocking layer. For example, asemiconductor device can comprise a die having a substrate with a frontside and a backside, an integrated circuit, and a plurality of ball-padselectrically coupled to the integrated circuit. The semiconductor devicecan further include a conductive redistribution structure havinginterconnects electrically coupled to the integrated circuit and traceselectrically coupling the ball-pads to corresponding interconnects. Thesemiconductor device can further include an infrared blocking layer onthe conductive redistribution structure and a photo-resist layer on theinfrared blocking layer. The infrared blocking layer is notphotoreactive and has openings aligned with the ball-pads, and thephotoresist layer has apertures aligned with the openings through theinfrared blocking layer.

Any one of the imagers or other types of semiconductor devices describedabove with reference to FIGS. 2A-7 can be incorporated into largerand/or more complex systems, a representative sample of which is system800 shown schematically in FIG. 8. The system 800 can include aprocessor 801, a memory device 802 (e.g., SRAM, DRAM, Flash and/or othermemory devices), input/output devices 803, and/or other subsystems orcomponents at 804. The foregoing semiconductor components describedabove with reference to FIGS. 2A-7 may be included in any of thecomponents shown in FIG. 8. The resulting system 800 can perform any ofa wide variety of computing, processing, storage, sensing, imaging,and/or other functions. Accordingly, representative systems 800 caninclude, without limitation, computers and/or other data processors suchas desktop computers, laptop computers, internet appliances, hand-helddevices (e.g., palm-top computers, wearable computers, cellular ormobile phones, personal digital assistants, etc.), multi-processorsystems, processor-based or programmable consumer electronics, networkcomputers, and mini-computers. Other representative systems 800 caninclude cameras, light or other radiation sensors, servers andassociated server subsystems, and/or display devices. In such systems,individual dies can include imager arrays, such as CMOS imagers.Components of the system 800 may be housed in a single unit ordistributed over multiple, interconnected units (e.g., through acommunications network). The components of the system 800 canaccordingly include local and/or remote memory devices and any of a widevariety of computer-readable media.

From the foregoing, it will be appreciated that specific embodiments ofthe invention have been described herein for purposes of illustration,but well-known structures and functions have not been shown or describedin detail to avoid unnecessarily obscuring the description of theembodiments of the invention. Where the context permits, singular orplural terms may also include the plural or singular term, respectively.Unless the word “or” is associated with an express clause indicatingthat the word should be limited to mean only a single item exclusivefrom the other items in reference to a list of two or more items, thenthe use of “or” in such a list shall be interpreted as including (a) anysingle item in the list, (b) all of the items in the list, or (c) anycombination of the items in the list. Additionally, the term IR blockinglayer can mean “radiation blocking” that can at least substantiallyblock a selected radiation other than IR.

From the foregoing, it will be appreciated that specific embodimentsdescribed above are for purposes of illustration and that variousmodifications may be made without deviating from the invention. Aspectsof the disclosure described in the context of particular embodiments maybe combined or eliminated in other embodiments. Further, whileadvantages associated with certain embodiments of the disclosure mayhave been described in the context of those embodiments, otherembodiments may also exhibit such advantages, but not all embodimentsneed necessarily exhibit such advantages to fall within the scope of thedisclosure. Accordingly, the present invention is not limited to theembodiments described above, which were provided for ease ofunderstanding, but rather the invention includes any and all otherembodiments defined by the claims.

I/We claim:
 1. A method of manufacturing a microelectronic imager havinga substrate, an imager sensor located at a first side of the substrate,integrated circuitry coupled to the image sensor, and a bond-pad at thefirst side of the substrate, the method comprising: forming aredistribution structure having a through-substrate interconnect and atrace electrically coupled to the through-substrate interconnect, thethrough-substrate interconnect extending from the bond-pad to a secondside of the substrate and the trace extending over the second side ofthe substrate, and the second side of the substrate being opposite thefirst side of the substrate; disposing a first material over the trace,the first material including a substantially non-photoreactive radiationblocking material; disposing a second material on the first material,the second material including a photoreactive material; forming anaperture in the second material, the aperture being generally inalignment with the trace; and forming an opening in the first materialthrough the aperture to expose a portion of the trace.
 2. The method ofclaim 1 wherein: the first material is a first preformed sheet having afirst thickness and the second material is a second preformed sheetlaminated to the first preformed sheet, the first and second preformedsheets forming a laminated bi-layer structure before disposing the firstmaterial over the trace; disposing the first material over the tracecomprises placing the laminated bi-layer structure on the redistributionstructure under a vacuum with the first preformed sheet below the secondpreformed sheet and releasing the vacuum to conform the laminatedbi-layer structure to the topography of the redistribution structure;and forming the aperture in the second material comprises exposing thesecond preformed sheet to a pattern of radiation energy and developingthe second preformed sheet thereby forming the aperture in the secondpreformed sheet through which the opening is etched in the firstmaterial.
 3. The method of claim 1 wherein the first material comprisesa first preformed sheet of an IR blocking material having a firstthickness and the second material comprises a second preformed sheet,and wherein the method further comprises laminating the first and secondpreformed sheets together before disposing the first material over thetrace.
 4. The method of claim 3 wherein the first preformed sheetcomprises a carbon black material and the second preformed sheetcomprises a dry resist.
 5. The method of claim 1 wherein the firstmaterial comprises a first preformed sheet of an IR blocking materialand the method further comprises forming a laminated bi-layer structureby disposing the second material onto the first performed sheet.
 6. Themethod of claim 5 wherein the second material comprises a dry resist anddisposing the second material onto the first preformed sheet comprisesdepositing the dry resist on the first preformed sheet.
 7. The method ofclaim 6 wherein the dry resist is deposited onto the first performedsheet before disposing the first material over the trace.
 8. The methodof claim 1 wherein disposing the first material over the trace comprisesdepositing a conformal layer of IR blocking material over the secondside of the substrate.
 9. A method of manufacturing a microelectronicimager having a substrate, an imager sensor located at a first side ofthe substrate, integrated circuitry coupled to the image sensor, aredistribution structure, and a bond-pad at the first side of thesubstrate, the redistributon structure having (a) a through-substrateinterconnect between the first side and a second side of the substrateand (b) a trace over the second side of the substrate, the methodcomprising: placing a first material on the trace of the redistributionstructure at the second side of the substrate, the first materialincluding a substantially non-photoreactive radiation blocking material;disposing a second material on the first material placed on the trace,the second material including a photoreactive material; forming anaperture in the second material, the aperture being generally inalignment with a portion of the trace; and removing a portion of thefirst material through the aperture to expose the portion of the trace.10. The method of claim 9 wherein: the first material is a firstpreformed sheet and the second material is a second preformed sheetlaminated to the first preformed sheet, the first and second preformedsheets forming a laminated bi-layer structure before placing the firstmaterial over the trace; placing the first material over the tracecomprises: placing the laminated bi-layer structure on theredistribution structure under a vacuum with the first preformed sheetbelow the second preformed sheet; releasing the vacuum to conform thelaminated bi-layer structure to the topography of the redistributionstructure; and forming the aperture in the second material comprisesexposing the second preformed sheet to a pattern of radiation energy anddeveloping the second preformed sheet to form the aperture in the secondpreformed sheet.
 11. The method of claim 9 wherein the first materialcomprises a first preformed sheet of a carbon black material and thesecond material comprises a second preformed sheet of a dry resist, andwherein the method further comprises laminating the first and secondpreformed sheets together before disposing the first material over thetrace.
 12. The method of claim 9 wherein placing the first material overthe trace comprises depositing a conformal layer of IR blocking materialover the second side of the substrate.
 13. The method of claim 9wherein: the first material is a first preformed sheet of an IR blockingmaterial; placing the first material over the trace comprises: placingthe preformed sheet of IR blocking material on the redistributionstructure under a vacuum; releasing the vacuum with the preformed sheetof IR blocking material placed on the redistribution structure; drawinga portion of the preformed sheet of IR blocking material into at leastthe through-substrate interconnect; and conforming the preformed sheetof IR blocking material to the topography of the redistributionstructure; the second material includes a liquid photoresist; disposingthe second material includes disposing the liquid photoresist onto thefirst material via a spin-on process; forming the aperture in the secondmaterial comprises exposing the second material to a pattern ofradiation energy and developing the second material to form the aperturein the second material; and removing the portion of the first materialincludes: drying etching the first material through the aperture and thesecond material on the first material; and selecting a thickness of atleast one of the first and second materials such that a target thicknessof both the first and second material remain on the second side of thesubstrate after the portion of the trace is exposed.